A comparison of liquid and gas phase surface preparation of III–V compound semiconductors for atomic layer deposition

Published 2008 View Full Article

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Title
A comparison of liquid and gas phase surface preparation of III–V compound semiconductors for atomic layer deposition
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 86, Issue 2, Pages 122-127
Publisher
Elsevier BV
Online
2008-07-18
DOI
10.1016/j.mee.2008.07.004

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