Net negative charge in low-temperature SiO2 gate dielectric layers

Published 2009 View Full Article

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Title
Net negative charge in low-temperature SiO2 gate dielectric layers
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 86, Issue 7-9, Pages 1707-1710
Publisher
Elsevier BV
Online
2009-03-27
DOI
10.1016/j.mee.2009.03.124

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