Miniaturized PMMA ball-valve micropump with cylindrical electromagnetic actuator

Published 2007 View Full Article

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Title
Miniaturized PMMA ball-valve micropump with cylindrical electromagnetic actuator
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 85, Issue 5-6, Pages 1104-1107
Publisher
Elsevier BV
Online
2007-12-19
DOI
10.1016/j.mee.2007.12.013

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