Frequency and voltage effects on the dielectric properties and electrical conductivity of Al–TiW–Pd2Si/n-Si structures

Published 2007 View Full Article

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Title
Frequency and voltage effects on the dielectric properties and electrical conductivity of Al–TiW–Pd2Si/n-Si structures
Authors
Keywords
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Journal
MICROELECTRONIC ENGINEERING
Volume 85, Issue 2, Pages 247-252
Publisher
Elsevier BV
Online
2007-06-04
DOI
10.1016/j.mee.2007.05.044

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