Fabrication of CNTs/Cu composite thin films for interconnects application

Published 2008 View Full Article

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Title
Fabrication of CNTs/Cu composite thin films for interconnects application
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 85, Issue 10, Pages 1984-1987
Publisher
Elsevier BV
Online
2008-05-17
DOI
10.1016/j.mee.2008.04.046

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