Towards fully polymeric MEMS: Fabrication and testing of PEDOT/PSS strain gauges

Published 2008 View Full Article

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Title
Towards fully polymeric MEMS: Fabrication and testing of PEDOT/PSS strain gauges
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 85, Issue 5-6, Pages 1050-1053
Publisher
Elsevier BV
Online
2008-01-29
DOI
10.1016/j.mee.2008.01.051

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