Overview of dual damascene integration schemes in Cu BEOL integration

Published 2008 View Full Article

  1. Home
  2. Publications
  3. Publication Search
  4. Publication Details
Title
Overview of dual damascene integration schemes in Cu BEOL integration
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 85, Issue 10, Pages 2128-2132
Publisher
Elsevier BV
Online
2008-06-12
DOI
10.1016/j.mee.2008.05.034

Ask authors/readers for more resources

Protocol

Community support

Reagent

Community support

Reprint

Contact the author

Become a Peeref-certified reviewer

The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.

Get Started

Ask a Question. Answer a Question.

Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.

Get Started
Webinars Posters Questions Hubs Funding Journals Articles Connect Collections Reviewers About Us FAQs Mobile App Privacy Policy Terms of Use
© Peeref 2019-2024. All rights reserved.