Journal
MICROELECTRONIC ENGINEERING
Volume 85, Issue 5-6, Pages 1022-1026Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.mee.2008.01.029
Keywords
micromanipulation; microgripper; lateral force microscopy; laser beam deflection
Ask authors/readers for more resources
The possibility of controlled gripping during micromanipulation procedures is widely desired in the fields of microbiology and microassembly. For achieving it, measurement or calculation of the forces exerted by the end segment of the manipulator are required. This work presents a method for detecting the gripping moment for a mechanically actuated silicon microgripper. A procedure that combines measurements with simulation results was developed for calculating the forces exerted by the tips of the gripper. (C) 2008 Elsevier B.V. All rights reserved.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available