Thermal conductivity measurements of low-k films using thermoreflectance phenomenon

Published 2008 View Full Article

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Title
Thermal conductivity measurements of low-k films using thermoreflectance phenomenon
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 85, Issue 5-6, Pages 796-799
Publisher
Elsevier BV
Online
2008-01-10
DOI
10.1016/j.mee.2007.12.053

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