Nano-scale metallization of Au on flexible polyimide substrate by reversal imprint and lift-off process

Title
Nano-scale metallization of Au on flexible polyimide substrate by reversal imprint and lift-off process
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 85, Issue 7, Pages 1561-1567
Publisher
Elsevier BV
Online
2008-03-11
DOI
10.1016/j.mee.2008.02.015

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