Structure analysis and property improvements of the computer-simulated fullerene-based ultralow-k dielectrics

Published 2008 View Full Article

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Title
Structure analysis and property improvements of the computer-simulated fullerene-based ultralow-k dielectrics
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 85, Issue 10, Pages 2118-2122
Publisher
Elsevier BV
Online
2008-06-03
DOI
10.1016/j.mee.2008.05.024

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