The frequency and voltage dependent electrical characteristics of Al–TiW–Pd2Si/n-Si structure using I–V, C–V and G/ω–V measurements

Title
The frequency and voltage dependent electrical characteristics of Al–TiW–Pd2Si/n-Si structure using I–V, C–V and G/ω–V measurements
Authors
Keywords
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Journal
MICROELECTRONIC ENGINEERING
Volume 85, Issue 2, Pages 365-370
Publisher
Elsevier BV
Online
2007-07-31
DOI
10.1016/j.mee.2007.07.010

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