A nanoanalytical investigation of elemental distributions in high-k dielectric gate stacks on silicon

Published 2007 View Full Article

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Title
A nanoanalytical investigation of elemental distributions in high-k dielectric gate stacks on silicon
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 85, Issue 1, Pages 61-64
Publisher
Elsevier BV
Online
2007-03-16
DOI
10.1016/j.mee.2007.03.001

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