Nanoimprint for future non-volatile memory and logic devices

Title
Nanoimprint for future non-volatile memory and logic devices
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 85, Issue 5-6, Pages 870-872
Publisher
Elsevier BV
Online
2008-02-12
DOI
10.1016/j.mee.2008.01.101

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