Evaporation based micro pump integrated into a scanning force microscope probe

Title
Evaporation based micro pump integrated into a scanning force microscope probe
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 85, Issue 5-6, Pages 1302-1305
Publisher
Elsevier BV
Online
2008-01-10
DOI
10.1016/j.mee.2007.12.047

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