Work function control at metal high-dielectric-constant gate oxide interfaces

Title
Work function control at metal high-dielectric-constant gate oxide interfaces
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 85, Issue 1, Pages 9-14
Publisher
Elsevier BV
Online
2007-02-28
DOI
10.1016/j.mee.2007.01.240

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