Thermal Processes and Emission of Atoms from the Liquid Phase Target Surface of a Magnetron Sputtering System

Published 2015 View Full Article

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Title
Thermal Processes and Emission of Atoms from the Liquid Phase Target Surface of a Magnetron Sputtering System
Authors
Keywords
magnetron sputtering system with a liquid-phase target, emission of atoms from the liquid phase, sputtering, evaporation
Journal
Russian Physics Journal
Volume 58, Issue 4, Pages 431-437
Publisher
Springer Nature
Online
2015-08-08
DOI
10.1007/s11182-015-0517-6

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