Wafer-level fabrication of low power consumption integrated alcohol micro sensor

Published 2018 View Full Article

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Title
Wafer-level fabrication of low power consumption integrated alcohol micro sensor
Authors
Keywords
-
Journal
Micro & Nano Letters
Volume -, Issue -, Pages -
Publisher
Institution of Engineering and Technology (IET)
Online
2018-09-13
DOI
10.1049/mnl.2018.5183

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