Implantable hybrid chrome silicide temperature sensor for power MEMS devices

Published 2011 View Full Article

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Title
Implantable hybrid chrome silicide temperature sensor for power MEMS devices
Authors
Keywords
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Journal
Micro & Nano Letters
Volume 6, Issue 11, Pages 895
Publisher
Institution of Engineering and Technology (IET)
Online
2011-12-03
DOI
10.1049/mnl.2011.0431
References
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