Journal
METROLOGIA
Volume 55, Issue 4, Pages 541-557Publisher
IOP PUBLISHING LTD
DOI: 10.1088/1681-7575/aaca6f
Keywords
metrological actuator; high-resolution interferometry; homodyne interferometer; optical path multiplier; optical non-linearity; metrological angle sensor devices
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Funding
- European Community's Seventh Framework Programme, ERA-NET Plus [217257]
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We present the realization and the characterization of a picometer reference actuator (PRA), a metrological instrument based on a precision linear actuator capable of 100 mu m range with subnanometer accuracy, picometer resolution, and submicroradian tip-tilt pointing control. The PRA relies on an integrated multiple reflections homodyne interferometer as a high resolution and accurate internal reference, on a multiple reflection based angle sensor for the control of the movement straightness, and on a versatile mirrors configuration to transfer the metrological traceability to an external device. As an example case we report the use of the PRA for the characterization of the non-linearities of the INRIM heterodyne interferometer dedicated to the calibration of capacitive sensors.
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