Accurate measurement of orthogonality of equal-period, two-dimensional gratings by an interferometric method

Published 2012 View Full Article

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Title
Accurate measurement of orthogonality of equal-period, two-dimensional gratings by an interferometric method
Authors
Keywords
-
Journal
METROLOGIA
Volume 49, Issue 3, Pages 236-244
Publisher
IOP Publishing
Online
2012-03-12
DOI
10.1088/0026-1394/49/3/236

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