Homogeneity characterization of lattice spacing of silicon single crystals by a self-referenced lattice comparator

Title
Homogeneity characterization of lattice spacing of silicon single crystals by a self-referenced lattice comparator
Authors
Keywords
-
Journal
METROLOGIA
Volume 48, Issue 2, Pages S55-S61
Publisher
IOP Publishing
Online
2011-03-23
DOI
10.1088/0026-1394/48/2/s09

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