4.7 Article

Ultra-sensitive nucleic acids detection with electrical nanosensors based on CMOS-compatible silicon nanowire field-effect transistors

Journal

METHODS
Volume 63, Issue 3, Pages 212-218

Publisher

ACADEMIC PRESS INC ELSEVIER SCIENCE
DOI: 10.1016/j.ymeth.2013.07.012

Keywords

Ultra-sensitive; Nucleic acids; Silicon nanowire; CMOS-compatible; Biosensor

Funding

  1. National Basic Research Program of China (973 Program) [2012CB933301, 2012CB932600]
  2. Creative Research of National Natural Science Foundation of China [61021064]
  3. National Natural Science Foundation of China [60936001, 91123037, 81201358]
  4. Shanghai International S&T Cooperation Project [12410707300]

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Silicon nanowire field-effect transistors (SiNW-FETs) have recently emerged as a type of powerful nanoelectronic biosensors due to their ultrahigh sensitivity, selectivity, label-free and real-time detection capabilities. Here, we present a protocol as well as guidelines for detecting DNA with complementary metal oxide semiconductor (CMOS) compatible SiNW-FET sensors. SiNWs with high surface-to-volume ratio and controllable sizes were fabricated with an anisotropic self-stop etching technique. Probe DNA molecules specific for the target DNA were covalently modified onto the surface of the SiNWs. The SiNW-FET nanosensors exhibited an ultrahigh sensitivity for detecting the target DNA as low as 1 fM and good selectivity for discrimination from one-base mismatched DNA. (C) 2013 Elsevier Inc. All rights reserved.

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