Transparent and flexible oxide thin-film-transistors using an aluminum oxide gate insulator grown at low temperature by atomic layer deposition

Title
Transparent and flexible oxide thin-film-transistors using an aluminum oxide gate insulator grown at low temperature by atomic layer deposition
Authors
Keywords
-
Journal
METALS AND MATERIALS INTERNATIONAL
Volume 18, Issue 6, Pages 1055-1060
Publisher
Springer Nature
Online
2012-11-20
DOI
10.1007/s12540-012-6020-5

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