Laser ablation of titanium nitride coated on silicon wafer substrate for depth profiling using ICP-MS

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Title
Laser ablation of titanium nitride coated on silicon wafer substrate for depth profiling using ICP-MS
Authors
Keywords
Laser ablation, Depth profiling, Titanium nitride, Silicon wafer, ICP-MS
Journal
APPLIED SURFACE SCIENCE
Volume 327, Issue -, Pages 483-489
Publisher
Elsevier BV
Online
2014-11-29
DOI
10.1016/j.apsusc.2014.11.123

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