A system to measure minute hydraulic permeability of nanometer scale devices in a non-destructive manner

Published 2011 View Full Article

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Title
A system to measure minute hydraulic permeability of nanometer scale devices in a non-destructive manner
Authors
Keywords
-
Journal
MEASUREMENT SCIENCE and TECHNOLOGY
Volume 22, Issue 4, Pages 045802
Publisher
IOP Publishing
Online
2011-03-10
DOI
10.1088/0957-0233/22/4/045802

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