Fabrication, characterization and application of a microelectromechanical system (MEMS) thermopile for non-dispersive infrared gas sensors

Title
Fabrication, characterization and application of a microelectromechanical system (MEMS) thermopile for non-dispersive infrared gas sensors
Authors
Keywords
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Journal
MEASUREMENT SCIENCE and TECHNOLOGY
Volume 22, Issue 11, Pages 115206
Publisher
IOP Publishing
Online
2011-10-05
DOI
10.1088/0957-0233/22/11/115206

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