Micromachined flexible diaphragm backed PZT ultrasonic transducer with a controllable self-focused acoustic beam

Title
Micromachined flexible diaphragm backed PZT ultrasonic transducer with a controllable self-focused acoustic beam
Authors
Keywords
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Journal
MEASUREMENT SCIENCE and TECHNOLOGY
Volume 22, Issue 12, Pages 125204
Publisher
IOP Publishing
Online
2011-11-16
DOI
10.1088/0957-0233/22/12/125204

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