Dimension effect on mechanical behavior of silicon micro-cantilever beams

Published 2008 View Full Article

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Title
Dimension effect on mechanical behavior of silicon micro-cantilever beams
Authors
Keywords
-
Journal
MEASUREMENT
Volume 41, Issue 8, Pages 885-895
Publisher
Elsevier BV
Online
2008-01-20
DOI
10.1016/j.measurement.2007.12.007

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