Drastic reduction of RRAM reset current via plasma oxidization of TaOx film

Published 2015 View Full Article

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Title
Drastic reduction of RRAM reset current via plasma oxidization of TaOx film
Authors
Keywords
-
Journal
APPLIED SURFACE SCIENCE
Volume 324, Issue -, Pages 275-279
Publisher
Elsevier BV
Online
2014-11-02
DOI
10.1016/j.apsusc.2014.10.133

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