Research on titanium nitride thin films deposited by reactive magnetron sputtering for MEMS applications

Published 2015 View Full Article

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Title
Research on titanium nitride thin films deposited by reactive magnetron sputtering for MEMS applications
Authors
Keywords
Titanium nitride thin films, Reactive magnetron sputtering, Adhesion, Mechanical and tribological characterization, MEMS
Journal
APPLIED SURFACE SCIENCE
Volume 358, Issue -, Pages 525-532
Publisher
Elsevier BV
Online
2015-07-16
DOI
10.1016/j.apsusc.2015.07.063

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