Deposition and characterization of multilayer DLC:Mo thin films grown on silicon substrate by off-axis pulsed laser deposition technique

Published 2015 View Full Article

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Title
Deposition and characterization of multilayer DLC:Mo thin films grown on silicon substrate by off-axis pulsed laser deposition technique
Authors
Keywords
Pulsed laser deposition, DLC:Mo thin films, XRD, Refractive index, Optical band gap, Electrical resistivity
Journal
APPLIED SURFACE SCIENCE
Volume 331, Issue -, Pages 407-414
Publisher
Elsevier BV
Online
2015-01-20
DOI
10.1016/j.apsusc.2015.01.083

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