Effect of AlN buffer thickness on GaN epilayer grown on Si(111)

Title
Effect of AlN buffer thickness on GaN epilayer grown on Si(111)
Authors
Keywords
-
Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 14, Issue 2, Pages 97-100
Publisher
Elsevier BV
Online
2011-03-08
DOI
10.1016/j.mssp.2011.01.006

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