Enhancement in electrical performance of indium gallium zinc oxide-based thin film transistors by low temperature thermal annealing

Published 2011 View Full Article

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Title
Enhancement in electrical performance of indium gallium zinc oxide-based thin film transistors by low temperature thermal annealing
Authors
Keywords
-
Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 13, Issue 5-6, Pages 320-324
Publisher
Elsevier BV
Online
2011-03-17
DOI
10.1016/j.mssp.2011.02.012

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