Effect of Si target sputtering power on diffusion barrier properties of Ta–Si–N thin films

Published 2008 View Full Article

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Title
Effect of Si target sputtering power on diffusion barrier properties of Ta–Si–N thin films
Authors
Keywords
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Journal
MATERIALS SCIENCE AND TECHNOLOGY
Volume 25, Issue 3, Pages 419-424
Publisher
Informa UK Limited
Online
2008-11-04
DOI
10.1179/174328408x270211

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