Studies on the effect of hydrogen doping during deposition of Al:ZnO films using RF magnetron sputtering

Published 2012 View Full Article

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Title
Studies on the effect of hydrogen doping during deposition of Al:ZnO films using RF magnetron sputtering
Authors
Keywords
-
Journal
Materials Science and Engineering B-Advanced Functional Solid-State Materials
Volume 177, Issue 20, Pages 1777-1782
Publisher
Elsevier BV
Online
2012-09-02
DOI
10.1016/j.mseb.2012.08.026

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