Effect of nitrogen doping concentration on the properties of TiO2 films grown by atomic layer deposition

Published 2011 View Full Article

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Title
Effect of nitrogen doping concentration on the properties of TiO2 films grown by atomic layer deposition
Authors
Keywords
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Journal
Materials Science and Engineering B-Advanced Functional Solid-State Materials
Volume 176, Issue 7, Pages 596-599
Publisher
Elsevier BV
Online
2011-02-18
DOI
10.1016/j.mseb.2011.02.001

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