Journal
MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS
Volume 149, Issue 3, Pages 275-280Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.mseb.2007.08.006
Keywords
macroporous silicon; three-dimensional structures; photonic crystals; electrochemical etching; alkaline etching
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We study the optical properties of three-dimensional (3D) microstructures fabricated by electrochemical etching of macroporous silicon with modulated pore diameter. Optical measurements along the pore axis reveal photonic band gaps which are also confirmed by calculations of photonic band dispersion. We investigate numerically and experimentally the evolution of these gaps as a function of pore diameter modulation. In addition, a subsequent anisotropic etching of macroporous silicon in alkaline solutions allows to achieve pores with new shapes of modulation. We compare the optical characteristics of 3D macroporous structures with and without such anisotropic treatment. (C) 2007 Elsevier B.V. All rights reserved.
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