Nanomechanical properties of thick porous silicon layers grown on p- and p+-type bulk crystalline Si

Published 2011 View Full Article

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Title
Nanomechanical properties of thick porous silicon layers grown on p- and p+-type bulk crystalline Si
Authors
Keywords
-
Journal
MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING
Volume 528, Issue 29-30, Pages 8715-8722
Publisher
Elsevier BV
Online
2011-09-01
DOI
10.1016/j.msea.2011.08.051

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