Structuring of sputtered superelastic NiTi thin films by photolithography and etching

Published 2007 View Full Article

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Title
Structuring of sputtered superelastic NiTi thin films by photolithography and etching
Authors
Keywords
-
Journal
MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING
Volume 481-482, Issue -, Pages 623-625
Publisher
Elsevier BV
Online
2007-06-08
DOI
10.1016/j.msea.2006.10.216

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