Trends in semiconductor defect engineering at the nanoscale

Published 2010 View Full Article

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Title
Trends in semiconductor defect engineering at the nanoscale
Authors
Keywords
-
Journal
MATERIALS SCIENCE & ENGINEERING R-REPORTS
Volume 70, Issue 3-6, Pages 151-168
Publisher
Elsevier BV
Online
2010-07-06
DOI
10.1016/j.mser.2010.06.007

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