4.6 Article

Substrate temperature effect on the growth of carbon nanowalls synthesized via microwave PECVD

Journal

MATERIALS RESEARCH BULLETIN
Volume 58, Issue -, Pages 112-116

Publisher

PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.materresbull.2014.07.001

Keywords

Nanostructures; Plasma deposition; Electron microscopy

Funding

  1. Basic Science Research Program of the National Research Foundation of Korea (NRF) - Ministry of Education, Science, and Technology [2011-0014328]
  2. National Research Foundation of Korea [2011-0014328] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)

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A carbon nanowall (CNW) is a carbon-based nanomaterial that is constructed with vertical-structure graphenes. Thus, it effectively increases the reaction surface of electrodes. In this study, the substrate temperature effect on the growth of CNWs was investigated via microwave plasma enhanced chemical vapor deposition (PECVD) with methane (CH4) and hydrogen (H-2) gases on silicon substrates. To find the growth mechanism of a CNW, its growth temperature was changed from 700 degrees C to 950 degrees C. The vertical and surface conditions of the grown CNWs according to the growth temperature were characterized via field emission scanning electron microscopy (FE-SEM). The energy-dispersive spectroscopy (EDS) measurements showed that the CNWs were composed solely of carbon. (C) 2014 Elsevier Ltd. All rights reserved.

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