Annealing effect in structural and electrical properties of sputtered Mo thin film

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Title
Annealing effect in structural and electrical properties of sputtered Mo thin film
Authors
Keywords
Thin films, Mo, Sputtering growth, Annealing, Structural properties
Journal
APPLIED SURFACE SCIENCE
Volume 334, Issue -, Pages 129-137
Publisher
Elsevier BV
Online
2014-09-03
DOI
10.1016/j.apsusc.2014.08.154

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