Chemical mechanical polishing of steel substrate using colloidal silica-based slurries

Title
Chemical mechanical polishing of steel substrate using colloidal silica-based slurries
Authors
Keywords
Chemical mechanical polishing, AISI 52100 steel, Glycine, Hydrogen peroxide, Benzotriazole
Journal
APPLIED SURFACE SCIENCE
Volume 330, Issue -, Pages 487-495
Publisher
Elsevier BV
Online
2015-01-10
DOI
10.1016/j.apsusc.2015.01.016

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