Influence of hydrogen annealing on the properties of hafnium oxide thin films

Published 2011 View Full Article

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Title
Influence of hydrogen annealing on the properties of hafnium oxide thin films
Authors
Keywords
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Journal
MATERIALS CHEMISTRY AND PHYSICS
Volume 126, Issue 3, Pages 515-523
Publisher
Elsevier BV
Online
2011-02-06
DOI
10.1016/j.matchemphys.2011.01.036

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