Influence of O2 partial pressure on the growth of nanostructured anatase phase TiO2 thin films prepared by DC reactive magnetron sputtering

Published 2011 View Full Article

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Title
Influence of O2 partial pressure on the growth of nanostructured anatase phase TiO2 thin films prepared by DC reactive magnetron sputtering
Authors
Keywords
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Journal
MATERIALS CHEMISTRY AND PHYSICS
Volume 126, Issue 1-2, Pages 73-81
Publisher
Elsevier BV
Online
2011-01-06
DOI
10.1016/j.matchemphys.2010.12.008

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