Investigation of Antiadhesive Coatings for Nanoimprinting Lithography
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Title
Investigation of Antiadhesive Coatings for Nanoimprinting Lithography
Authors
Keywords
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Journal
MATERIALS AND MANUFACTURING PROCESSES
Volume 25, Issue 7, Pages 658-664
Publisher
Informa UK Limited
Online
2010-08-06
DOI
10.1080/10426910903496888
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