Mechanical properties of pulsed laser deposited nanocrystalline SiC films

Published 2015 View Full Article

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Title
Mechanical properties of pulsed laser deposited nanocrystalline SiC films
Authors
Keywords
SiC, Hard coatings, Pulsed laser deposition, Mechanical properties
Journal
APPLIED SURFACE SCIENCE
Volume 336, Issue -, Pages 391-395
Publisher
Elsevier BV
Online
2015-01-06
DOI
10.1016/j.apsusc.2014.12.186

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