Role of Al2O3 intermediate layer for improving the quality of polycrystalline-silicon film in inverted aluminum-induced layer exchange

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Title
Role of Al2O3 intermediate layer for improving the quality of polycrystalline-silicon film in inverted aluminum-induced layer exchange
Authors
Keywords
Polycrystalline thin film, Inverted aluminum-induced layer exchange, Intermediate layer
Journal
APPLIED SURFACE SCIENCE
Volume 327, Issue -, Pages 37-42
Publisher
Elsevier BV
Online
2014-11-23
DOI
10.1016/j.apsusc.2014.11.098

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