Ar ions irradiation effects in ZrN thin films grown by pulsed laser deposition

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Title
Ar ions irradiation effects in ZrN thin films grown by pulsed laser deposition
Authors
Keywords
ZrN, Hard coating, Pulsed laser deposition, Radiation effects
Journal
APPLIED SURFACE SCIENCE
Volume 336, Issue -, Pages 129-132
Publisher
Elsevier BV
Online
2014-10-18
DOI
10.1016/j.apsusc.2014.10.032

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